Study On The Properties Of Fe-Ga-Al-Y Magnetostrictive Film Prepared By IBSD

In this paper,Fe-Ga-Al-Y MF and Fe-Ga-Al-Y/TbDy-Fe multilayers were prepared by ion beam sputtering deposition(IBSD)method on beryllium bronze substrates.Fe-Ga-Al-Y MF prepared in different magnetic field environment were annealed by 200℃.The surface morphology,three-dimensional morphology,composition,structure,and Young’s modulus of thin film samples were tested and analyzed by the SEM,AFM,EDS,XRD diffraction,nanoindentation methods,respectively.The magnetic domain structure,static magnetoresistive performance,dynamic amplitude-frequency characteristics and soft magnetic characteristics of the film samples were tested and studied by the magnetic force microscope,the test system of static magnetoresistive characteristics,the test system of Helmholtz dynamic amplitude-frequency characteristics as well as alternating gradient magnetometer.The results show that:1.For the film samples prepared by IBSD,no matter monolayer film or a multilayer film,the film surface was smooth,ups and downs was small,the maximum height difference was only about 15.8nm and the structure of the film was uniform and compact with no obvious defects;film samples were the crystalline structure.The component of the Fe-Ga-Al-Y MF is Fe74.34-79.33Ga11.45-3.73Al5.33-6.95Y3.274.36 and the Young modulus was 163.5GPa.The magnetic contrast of film samples are relatively low and the magnetic moment(magnetic domains)of the film samples is mainly distributed in the film plane.2.Static magnetic field applied during film formation can regulate the easy magnetization direction of the film,the direction of the easy axis of magnetization is the same to the direction of the static magnetic field.With the increase of magnetic field,the coercive force of the film plane increase and the soft magnetic properties reduce.When the direction of static magnetic field is parallel to the minor axis direction of the substrate,it can significantly improve the magnetostrictive properties of the Fe-Ga-Al-Y MF and with the increase of magnetic field,the saturation magnetostriction coefficient of film has been continuously improved,but the magnetostrictive sensitivity of films at low field decreased slightly.When the Fe-Ga-Al-Y MF prepared in different magnetic field environment were annealed by 200℃,the saturation magnetostriction coefficient of film slightly decreased,but a sharp decline in the coercive force,the soft magnetic properties were improved.3.Different combinations of Fe-Ga-Al-Y/TbDy-Fe multilayers’ saturation magnetostrictive properties were superior to Fe-Ga-Al-Y monolayer film.When the total thickness of the multilayer film was constant,different combinations of multilayer film have an optimal combination,and the maximum saturation magnetostriction coefficient was about three times than monolayer film.With the decrease of TbDy-Fe layer thickness,the saturation magnetostriction coefficient of film exhibited a tendency to increase.The coercive force of multilayers within the film plane(along the x-axis direction,y-axis direction)was greater than the Fe-Ga-Al-Y MF and with the increase of TbDy-Fe layer thickness,The coercive force within the film plane gradually increased,the soft magnetic properties decreased.4.With the increase of the applied magnetic field during film formation,the resonance amplitude variation of Fe-Ga-Al-Y MF is little,but the resonance frequency of the film decreased.In different combinations of multilayer film,with the increase of Fe-Ga-Al-Y layer thickness,the resonance frequencies of the film first increased then decreased.5.Compare with the technology of applying magnetic field during film formation and vacuum annealing after film formation,nanocomposite technology is more cnducive to improve the.integrated magnetostrictive properties of Fe-Ga-Al-Y MF.