Study On The IBSD Preparation Method And Performance Control Of Fe-Ga-(X) Magnetostrictive Film

In this paper,Fe-Ga-Tb MF(magnetostrictive film)and Fe-Ga MF were prepared on beryllium-copper substrate by ion beam sputtering deposition(IBSD)method.The Fe-Ga-Tb MF and Fe-Ga MF prepared under different magnetic field conditions were vacuum annealed at 300 ?.The surface topography,three-dimensional morphology,composition and Young's modulus of the film samples were tested and analyzed by SEM,AFM,energy dispersive spectrometer,XRD diffractometer and nanoindenter respectively.The magnetic domain structure,static magnetostrictive properties,dynamic vibration amplitude-frequency characteristics and soft magnetic properties of the films were tested and studied by magnetic microscope,static magnetic properties testing system,Helmholtz dynamic amplitude-frequency characteristic testing system and multifunctional vibrating sample magnetometer.The results show that:The surface of the films prepared by the experiment is smooth,ups and downs is low,the maximum height difference is only 22.5nm,the structure of the films is uniform and compact without obvious defects;film samples are the crystalline structure;The composition of Fe-Ga-Tb MF and Fe-Ga MF is Fe84.3-86.8Ga13.2-15.7Tb0-1 and Fe86.1-87.1Ga12.8-13.9,respectively;The Young's modulus of Fe-Ga-Tb MF and Fe-Ga MF is 184.8 GPa and 177.8 GPa,respectively.An large magnetic anisotropy perpendicular to the film surface exists in the film prepared without magnetic.The magnetic domains of the films prepared under the constant magnetic field and prepared under the constant magnetic field after vacuum annealing treatmentare are mainly distributed in the film plane with small perpendicular magnetic anisotropy.When the film is prepared with an applied steady magnetic field,the easy axis of the film is parallel to the applied magnetic field,and it will improve the saturation magnetization Ms and the remanent magnetization Mr of the thin film,and the coercivity of the film is reduced effectively in the X-axis direction and Y-axis direction,the soft magnetic properties of the film are enhanced.The applied magnetic field makes the film have greater saturation magnetostriction coefficient and better low field susceptibility,and the saturation magnetostriction coefficient increases with the increase of the applied magnetic field,the amplitude of resonance is also increased by the introduction of an external magnetic field during film formation.The static magnetic properties and dynamic amplitude-frequency characteristics of the film are improved.After vacuum annealing,the saturation magnetization of Fe-Ga-(X)MF prepared in different steady magnetic fields is slightly lower in the plane(along x-axis and y-axis),but the coercivity is obviously reduced,the soft magnetic properties are improved remarkably.Although the saturation magnetostriction coefficient of the film sample after vacuum annealing treatment is slightly lower,the low field magnetic susceptibility and resonance amplitude are obviously improved,the film has better low-field magnetostrictive performance and dynamic vibration amplitude-frequency characteristics.The Fe-Ga-Tb MF prepared under the condition of an input current of 3A and subjected to vacuum annealing has a higher saturation magnetization in both the X direction and the Y direction,the coercive force is smaller in the X direction and the Y direction,has better soft magnetic properties.The Fe-Ga-Tb MF prepared by this method has a high saturation magnetostriction coefficient and a resonance amplitude while maintaining a better low-field magnetic susceptibility,and exhibits a better integrated magnetostrictive performance.