Preparation And Properties Of SmCo-based Films

The SmCo rare earth magnetic material is an important part of the functional material,and the magnetic devices that are produced by it,are heavily applied to defense technologies,aerospace,information networks,automation,Microsystems,and many other fields.In the application of SmCo film,which makes it widely used in high magnetic recording materials.At the same time,because of the difficulty to overcome the shape anisotropy of thin film materials,it is a bottleneck technology to obtain a practical,easy-to-magnetize axis permanent magnetic film out of the vertical plane to provide the external field in the process of thinning and slicing of some magnetic devices.In view of performance of thin SmCo base magnetic film,a series of SmCo film were prepared,and the magnetic properties of thin films were macroscopically control by varying the sputtering power density,the annealing temperature,the annealing mode,and the thickness of the thin film,and adding buffer layer of different elements,etc.,and the optimal magnetic energy of the thin film was determined by means of using VSM,XRD,AFM,etc.To perform macroscopic and microscopic characterization of the magnetic properties of the film.Through the experiment we found that when sputtering target materials,if we set the power density as 1.77 W/cm2,maintaining the pressure of the working gas at 0.9pa,adding buffer layer of Cr,keeping annealing temperature at 700 °C,fixing the thickness of film at about 800 nm,the magnetic property of film can be the best,and in this case,coercive force within the film surface is 311.5 Oe,rectangle ratio is 0.62,out of plane,the coercive force is 1070 Oe,rectangle ratio 0.17,saturation magnetization is 9.05 k Gs.Lastly,we studied the related application of the SmCo base film on flexible substrate,put forward an idea that by physical stripping,realizes transfer of SmCo base film on the flexible substrate under high annealing temperature,and achieved good magnetism performance.After the transfer,the in-plane coercive force of the film is within 1077 Oe,saturation magnetization is 3.7 k Gs,remanent magnetization is1.3 k Gs,rectangle ratio of the film is 0.35;Coercive force outside surface is 1290 Oe,saturation magnetization is 3.8 k Gs,the remanent magnetization is 1 k Gs,outside the film surface,the rectangle ratio is 0.26,the paper provides a new thought on the transfer of films on flexible material substrate at a high temperature.