Development Of Heat Radiation Films For UV Curing System

In order to reduce the heat radiation of UV curing system,the structure of the reflection and absorption is introduced which based on the optical thin film theory.In the structure HfO2,AlF3,Cr are chosen as the coating material to design the film system with high reflection in UV band and high absorption in visible and near infrared band.After studying the optical and mechanical properties of the selected material and the vacuum deposition technology and the testing technology,the UV and visible near infrared absorption filters were prepared by analyzing the test results with the interactive analysis method and optimizing the process parameters,which has the average reflectivity 90.6% in 220~400nm wave band and average absorption rate 92.4% in 420~2000nm wave band.In the process of thin film development,the Al film is added as a transition layer between the substrate and the film system to improve the film’s firmness.The Cr film is prevented from oxidation at high temperature by the two-step deposition method.The Oxygen is introduced into the vicinity of the substrate by a copper tube to reduce the absorption of HfO2 material in the ultraviolet region.It is proved that the filter to meet the UV curing system requirements through the test.