Research On Compensation Technology Of Micro Machined Gyroscope Error Based On Signal Processing

Micro mechanical gyroscope with its military and civilian the two aspects of potential applications has become the key research direction in many institutions and electrostatic actuation and capacitive micromachined gyroscope with its simple structure, high sensitivity, low temperature drift become one of the hot research. But the micro mechanical gyro sensor has a variety of non ideal effects.Among them,the two kinds of non ideal effects,such as the quadrature error and the in-phase error,are mainly included in the micro-machined capacitive micro-machined gyroscope,which can severely restrict the performance of the micro mechanical gyroscope.Firstly,we understand the fundamental reason for the non ideal effect of micro machined gyroscope in theory,and then we establish the dual mass gyroscope model and the symmetric structure of micro mechanical gyroscope model with ANSYS software in this paper.The principle of the non ideal effect of the two kinds of gyroscope is simulated.The ideal state model of gyroscope and the presence of non ideal effects model simulation results,we can see the movement state of internal gyroscope working hours,and comparative analysis that the effects of the non ideal effects on the performance of the micro gyroscope.The simulation results show that the two non ideal effects will have an impact on the movement of micro mechanical gyro center module,Quadrature error causes the center module of micro mechanical gyroscope to deviate from the ideal position of the amplitude is much larger than the effect of the same in-phase error.Secondly,we analyze the reason from the two kinds of structure micro mechanical gyroscope quadrature error and phase error are analyzed in this paper.According to the results to modify the kinetic equation of micro mechanical gyroscope in the driving direction and the detection direction.According to the dynamic equation of micro mechanical gyroscope,we establish the ideal case,only the presence of phase errors,only quadrature error and at the same time there are two errors of the Simulink model and carry on the simulation.The simulation results of Simulink model show that the quadrature error is the main disturbance error of micro mechanical gyroscope,which has a great influence on the performance of the gyroscope,and the influence of the phase error is very weak.Lastly,in this paper we based on the micro mechanical gyroscope angular velocity signal extraction principle,and analyze the difference between the interferingsignal generated by the non ideal effect and the useful angular velocity signal.A scheme is proposed to eliminate the influence of the quadrature error and the in-phase error of the micro machined gyroscope,and the scheme is integrated,so that it can eliminate the influence of the quadrature error and the in-phase error,Then,the scheme is simulated by MATLAB,and the simulation results show that the proposed scheme can effectively suppress the effects of the two non ideal effects.The research results of this paper are expected to greatly improve the overall performance of micro machined gyroscope sensor system.It is important to promote the development of micro machined gyroscope sensor and accelerate its industrialization process.