| Gyroscope is one of the core inertial sensors in the inertial navigation system,which is used to measure the angular motion information of the carrier.Compared with traditional gyroscopes,micro-electromechanical gyroscopes have the advantages of low power consumption,small size,low cost and can be manufactured in batches,which are widely used in consumer electronics,automotive industry,aerospace and weapon equipment,and have great potential for development and promotion.However,microelectromechanical gyroscope is a complex electromechanical coupling system.It is easy to be disturbed by various non-ideal factors in the manufacturing process,which will ultimately reduce the performance of microelectromechanical gyroscope.In order to improve the performance of microelectromechanical gyroscope,it is necessary to analyse the errors caused by various kinds of interference fundamentally.In this paper,the self-error of butterfly micro-electromechanical gyroscope,which is easy to manufacture in batches without driving combs,is analyzed.The basic theory of butterfly micro-electromechanical gyroscope is analyzed,the sensitive structure of the gyroscope is introduced in detail,the driving and detecting torques in the working mode are deduced,the steady-state response of the gyroscope based on the simplified model is analyzed,and the working principles of capacitance detection circuit and angular velocity demodulation circuit are analyzed.The principle error of the butterfly microelectromechanical gyroscope is analyzed in depth.Based on the Lagrange equation with dissipative force,the complete dynamic equation of the butterfly microelectromechanical gyroscope is established.The dynamic equation is analyzed,simplified and solved,and the relationship between the principle orthogonal error term and the useful signal term is analyzed.The influence of structural error of inclined support beam on the sensitivity and driving moment of gyroscope is analyzed.The sensitive structure errors of butterfly micro-electromechanical gyroscope are analyzed in depth,and the influence of mass block errors on the resonant angle frequency of working mode and the output amplitude of the gyroscope is analyzed.The effects of electrode area and gap,linear and angular errors in assembly errors on driving moment,differential drive capacitance and differential detection capacitance are analyzed.Based on the steady-state response of the complete dynamic equation of the butterfly micro-electromechanical gyroscope,the error model of the gyroscope is proposed,and the test experiment is designed.The coefficients of the error model are obtained through the test. |
