Based On The Flexible Microelectrode Array Of Key Techniques Of Artificial Skin

With the development of science and technology, more and more attention has been paid to the intelligent sensor. Based on the fact that flexible tensile thin film microelectrode strain sensor is a perceived strain size of electronic devices after exposure to the pull force, it can attach to the non-smooth surface, and has a very wide range of applications in intelligent robots, artificial skin, wearable electronic devices and other fields. Gold has good electrical properties, it can be combined with the flexible substrate, obtained flexible and stable signal sensing materials, providing a new thought on the preparation and performance improvement of flexible stretchable film strain sensor. This paper is aimed at preparing and optimizing the performance of flexible electrode film strain sensor, carrying out the study on the mechanism of influence of gold film morphology thin film morphology on the electrical properties of the sensor, an equivalent resistance network model is proposed,and the model is verified by the experimental data.The flexible tensile microelectrode was prepared on the polydimethylsiloxane(PDMS) substrate sputtered gold film with different conditions. Then the tensile test was carried out on the electrode, and, the resistance V.S. strain characteristics of electrode were studied based on the data analysis. Finally, the tensile rate, stability,linearity and other parameters of the electrode were compared under the different process and experimental conditions combined with gold film microstructure figure.This paper analyzed the influence of micro crack morphology on the positive resistance strain behavior(PSCR) during tensile testing based on the theory of equivalent resistance network model. Through the combination of theory and experiment, we found that the resistance V.S. strain characteristics of the flexible tensile microelectrode with gold film and flexible substrate are related to the microstructure of the gold film surface. In a certain range of tension(100%), the resistance increased with the increase of strain. When the micro crack is not expanded to the maximum size. However, when the micro crack is expanded to the whole gold film, the conductive path is cut off, and the resistance is no longer changed with theincrease of the strain film.Based on the resistance V.S. strain characteristics of gold film on flexible base,we designed a measuring deformation strain sensor, to make a new type of flexible stretching microelectrode thin-film strain sensor which can be used for robot, artificial skin and so on. We have made a preliminary test on the basic performance parameters of the sensor and realized the real-time measurement of the strain.