The Research And Simulation Of Complementary Bipolar Integrated Circuits(CBIC) Technology Platform

Integrated operational amplifiers are required in many electronic systems with high speed, wider bandwidth, and less energy consumption.Integrated operational amplifiers that can meet these requirements are based only on complementary bipolar analog circuit processes.The complementary bipolar process can obtain a high frequency longitudinal NPN transistor and a PNP transistor having a very small parasitic capacitance on the same chip,This can be in a very small quiescent current with a very high characteristic frequency and a high rate of work.The vertical PNP tube does not have free collector, while the characteristic frequency of the lateral PNP transistor is only about 1% of the vertical PNP transistor in the original IC process production platform of the Micro Electronics Co., ltd., This article which is based on the 2um bipolar integrated circuit technology,by simulation, computer aided software simulation results, the development of 2um CBIC technology on the production line.First of all, based on the mature technology platform,discussion and modeling according to the key content of CBIC technology platform- the free collector vertical PNP transistor isolation technology. Process simulation and structure simulation by TCAD software,according to the simulation results, the optimal process scheme is selected, related process conditions are obtained,and the platform can isolate on the PN junction.to achieve on the PN junction isolation. And set up aindividual experiment, the actual data of individual experiments and simulation results are compared and analyzed.Then, based on the complementary bipolar process specific product(LF50AB). According to the electrical parameter modeling of product requirements, using TCAD software of simulation parameters, achieve a similar collector free vertical PNP transistor fabrication and electrical parameters and NPN transistors, obtained similar PNP and NPN tube electric characteristic curve. The layout of the product is carried out with L-Edit and the PCM layout design for parameter testing, and the layout is simulated with T-Spice software.At last, according to the simulation results, the original process is improved, the production process is optimized, and the actual production is put into production. Compared with the simulation results, the results show that the electrical characteristics of the free collector longitudinal PNP transistor are verified. Give the improvement plan for the product. 2um CBIC process was developed on the production line.