Research Of Microarray Based On One-imensional Porous Silicon Photonic Crystal

PSi is an excellent nano material which has good application prospects in biosensing. Microarray refers to a large number of analysis units and systems constructed on a small area of surface of the substrate, and arranged them orderly, thus realizing a fast and accurate detection to the biochemical composition.In this thesis, we take advantage of the good compatibility of PSi photonic devices, combine with the existing microfabrication techniques, adopt electrochemical etching method to prepare PSi photonic crystal microcavity array device. By adopting the analysis system of optical properties designed by ourselves and making use of the optical properties of photonic crystals, we study on the PSi microarray device, and realize fast, accurate and real-time parallel high sensitivity dectection. The paper consists of two parts:(1) Successfully designed and prepared one-dimensional PSi photonic crystals BR 8?8 microarray device using the optical properties of BR through self-designed optical characterization system, under the incidence of 633 nm laser, the digital images are used to observe the changes of PSi Bragg reflector with the P-type single crystalline and microarray chip as slides, and validate the feasibility of microarray chip through digital image rendering method, thus eliminating the difficulties of analyzing the central wavelength one by of this kind of microarray through spectrum instrument and achiving the goal of high sensitivity bioassay dectection.(2) Designed and prepared one-dimensional PSi photonic crystals microcavity 9?9 microarray device. Such optical properties are analyzed using transfer matrix method and the method suitable for detecting the refractive index of microarray is given. By studying on the incidence of He-Ne laser of 633 nm and the relationship the refractive index and reflectivity of each array unit of the microarray as well as the changes of reflectivity of array surface through digital image, the reflectivity measurement method is used to realize the detection of the changes of refractive index lower than 10-3. While by observing the brightness of digital image and the theoretical analysis of the difference of the layers of biological molecules entering into PSi, the detection sensivity will change greatly. The label-free, fast, real-time parallel high sensitivity detection of refractive index will be achieved.