Font Size: a A A

The Research On The Ga N Quantum Well Waveguide And Waveguide Integrated Devices

Posted on:2017-05-17Degree:MasterType:Thesis
Country:ChinaCandidate:D BaiFull Text:PDF
GTID:2308330491450262Subject:Electronic and communication engineering
Abstract/Summary:PDF Full Text Request
In the field of modern optical communication, planar integrated photonic devices have the advantages of small size, high stability and repeatability, and have broad application value and prospect. Nitride semiconductor materials in the III-V family have excellent photoelectric properties in the visible range, which can be used to fabricate various light source devices and planar photonic devices, so as to lay a foundation for the fabrication of integrated photonic devices based on the planar optical communication. Dielectric waveguide is the basic optical circuit in integrated photonic device, which is used to control the transmission of light wave. Research of nitride quantum well waveguide is an important prerequisite for the development of integrated photonic devices based on the visible light plane.In this thesis, the large size waveguide devices, suspended nitride integrated waveguide devices, and integrated devices of LED light sources and suspended waveguide based on nitride materials are studied. Content of research contain theoretical simulation, optimization design, preparation process and testing result analysis in many aspects. The main work include:Using effective index(EIM) method, finite element method(FEM) and finite difference time domain(FDTD) method, the structure optimization, design and fabrication scheme of integrated waveguide device is proposed. The structure and photoluminescence(PL) test of the device were carried out by using the scanning electron microscope(SEM), atomic force microscopy(AFM) and Raman(Raman) system;A multi branch waveguide device is proposed and designed for the planar waveguide devices. The fast atomic beam etching(FAB) and thin film fabrication technology are used to make the multi branch device, which can realize the multiplexing transmission function of 1′N. Function of the device was tested by Raman(Raman) system, and was simulated by the finite difference time domain(FDTD) algorithm, making preparation for further fabrication of the integration of the LED devices and the suspended waveguides;An integrated device of LED light source and suspended waveguide is proposed, the technology of nitride etching and silicon etching is used to realize the coupling and transmission of the LED light source along the waveguide plane. The device was tested by using the semiconductor parameter system of the laboratory, and the experimental results were analyzed. The experimental phenomena were in agreement with the original intention. Meanwhile, the photoelectric detection function of the LED device is tested by the experiment, which is the basis for the realization of the monolithic integrated photonic devices.
Keywords/Search Tags:Waveguide, photonic integration, gallium nitride, finite difference time domain, light emitting diode
PDF Full Text Request
Related items