The Terahertz Sensor Based On Micro-Nano Structure

With the appearence of terahertz source, a variety of devices has been developed based on THz technology, coupled with the micro-nano structure, that is, metamaterial further promote the rapid development of THz devices. Since the design of metamaterials is very flexible, various terahertz devices can be developed by this way,so in recent years a variety of THz devices have emerged based on metamaterial, and they also have a good performance, such as THZ filter, THZ modulator, THz absorber,THZ sensors and so on.This article mainly research terahertz sensor based on mocro-nano structures,precisely, the microfluidic sensor.Before study on THz microfluidic sensor, we first need to research the metamaterials to understand the properties of metamaterials, and some works of common structures, such as enhanced resonance and high Q factor are necessary.Certainly, the terahertz sensors also need to be researched, like the design and theoretical analysis of the sensor structure, and the sensor differs in different areas, and in a certain foundation before it could carry out research work our THz microfluidic sensor.Terahertz microfluidic sensor involves many aspects, at the beginning, we should have the design ideas of our devices and then use electromagnetic simulation software CST to model it. At mid-term, we use CST to optimize the device. At last, the experimental verification will be done, in this session, we also need to learn the processing for the device.After a long period of theoretical study, I studied the micro-nano technology in Suzhou Institute of Nano and prepared the peocessing of the sensor. The finished chip can not be directly tested because of the complex composition of the sensor, it needed to be Assembled. After a series of relatively tight packaging of our devices, we tested it and the results show that our design thinking is correct and feasible.