Precision Temprature Compensation Technology Research Of Silicon Piezoresistive Pressure Sensor

As a widely applied and rapidly developed new sensors, piezoresistive pressure sensor has the following characteristics: high accuracy, high sensitivity, high stability, wide frequency response range, can be more easily miniaturized and for mass production. However, piezoresistive pressure sensor by temperature characteristics of semiconductor, which limited the use and promotion of this sensor.In this paper, a temperature compensation system for silicon piezoresistive sensor is proposed to solve temperature drift. The set of systems to modern signal processing technology-based theory, temperature adjustment chip as the core of the original, high-performance digital signal processor control module, using cubic spline interpolation method for temperature compensation to fit the parameters of the piezoresistive pressure prone to temperature drift of the sensor defect disposable precise compensation.The main contents of the paper are as follows:1. The factors resulting in the temperature drift for piezoresistive pressure sensors are analyzed, and then compared the compensation methods of using hardware and software.Finally,a novel temperature compensation system is proposed for the piezoresistive pressure sensor.2. The program plans to establish intelligent temperature compensation system, using the chip of the MAX1452 and the derivation of argument. Subject to compliance with the requirements of the overall program, the corresponding functional blocks of a detailed classification system, while the plate how to implement a detailed program application design, along with the the plate corresponding hardware circuit board.3. We design a software compensation-based pressure sensor using the DSP chip TMS320LF2407, in which the polynomial-match and Newton insert numerical value is applied to compensate for the measured results.4. The above-mentioned two chemes have the advantage of high precision.