Vibration Test And Dynamic Compensation Research In Immersion Flow Field

Immersion lithography now is the only large-scale application of new technology lithography on 45 nm IC production line, different from the traditional dry lithography method, immersion lithography by filling pure water between the last piece of the projection lens and wafer improve the resolution of the liquid immersion exposure. In order to ensure yield, immersion system uses a liquid injection and recovery systems to ensure the purity of the immersion liquid, temperature and other environmental indicators meet the requirements, but the liquid injection and recovery system will bring instability to flow field, the vibration of which may cause circuit stripe is not clear, so the immersion flow field vibration force monitoring is necessary, but the range of immersion flow field vibration force is only±0.2N, while frequencies is up to about 300Hz, to achieve Designing such a small range of high-frequency response Test System is really a hard problem (details in chapter 2). This paper studies the dynamic compensation of low frequency response test system for dynamic testing requirements with high precision and high response, in this process mainly studied the following issues:1) Confirming reasons for the dynamic test distortion in this project are not only sensor performance limitations, but also the low-pass filter effect caused by indirect measurement of the intermediate transmission links, which were verified by designing and conducting spectrum test experiments;2) Achieved a novelty method of loading negative step force beyond the traditional selection step using electromagnetic force, in dynamic modeling experiments, so that the experimental platform can build a negative step force more simple, more accurate and more adjustment convenient with a bigger adjustment range;3) Analysis reveals that the frequency band of negative step oscillation response signal, and that of interfering signals caused by the residual magnetic effect do not overlap, so that uplift interference of electromagnetic negative step force remanence can be eliminated by high-pass filter to improve the accuracy of system modeling;4) For negative step response waveform appears distorted and partial response, we proposed a full-wave model identification and parameter optimization chopper combination of methods to achieve a model test system, and using the least squares method based on genetic algorithm to achieve a satisfactory parameter optimization results;5) Combining static recalibration and dynamic compensation to improve the test system performance, this paper designed a high precision and high frequency response test system design in a small measuring range and the performance evaluation test revealed that the dynamic response frequency is≥300Hz, broadened by≥47%, and the test accuracy is≥ 0.024N, which meet the system design requirements.