The Design And Development Of The Schottky Beam Lead Diodes Based On Silvaco TCAD Software

Silvaco TCAD software to DeckBuild simulators interactive environment for running the core tools, to the semiconductor technology all stages of design simulation provides a powerful impetus, Silvaco TCAD software includes visual interactive tools DeckBuild officer and Tonyplot, process simulation tools, device simulation tools ATLAS and device editor DevEdit, can be used for simulating beam lead schottky barrier diode design and device simulation.Beam lead technology used in high integration diode and microwave components, its starting point is to improve the reliability of the module and connected as much as possible. Beam lead schottky diode(beam lead- SBD), to reduce the device size, volume, increase the frequency of use.This paper is aiming at the above problems, with domestic and international market generic type HSCH5340 beam lead schottky barrier diode for development goals. From high frequency microwave schottky beam lead diodes theory design and the implementation of technology, by Silvaco TCAD simulation, software design and device of schottky beam lead diodes, design and process optimization, to achieve the beam lead schottky diode technology, eventually make the device to achieve development goals. The main contents as follows:1. The combination at home and abroad in recent years, research on beam lead the schottky diodes, schottky diode is discussed and the difference between pn diode, emphatically discusses the organization structure of this article.2. Simple introduced the Silvaco TCAD characteristics and usage of software, combined with the overseas for beam lead schottky diode research, analyzes the structure and the use of beam lead diodes.3. Analyses the beam lead the design of the schottky diodes, including selection of materials for schottky electrical parameters, the influence of beam lead schottky diode of VF, C, NF, the design of the electric parameters such as VR, RD, Silvaco TCAD simulation software of oxidation process and the device reliability design.4. Specific introduces the beam lead schottky diode technology implementation. Outlines the classical beam lead diodes universal process; Beam lead diodes metal "beam" analysis and design; Focuses on the beam lead schottky diode technological process, through five times lithography achieve beam lead schottky diode technology breakthrough.5. Implementation of the technology of beam lead schottky barrier diodes are detailed discussed.To sum up, through to the beam lead optimization design of the schottky diode and Silvaco TCAD software for simulation of the process, after many process test, beam lead for schottky diode technology, the development of the finished product.