| Terahertz wave, with its low photon energy of electromagnetic wave, different characteristics of absorption properties, allowing large channel capacity, is now widely used in astronomy, materials, medical, manufacturing, communications and other fields,and in the terahertz communication system. Referring to the domestic and foreign development in recent years, the terahertz filter with frequency higher than 100 GHz and excellent performance is not much, and in the 300 GHz frequency above range research results is very rare. The main content of this paper is the design of 300 GHz bandpass filter on research.In order to make a breakthrough in the innovation, the design of the 300 GHz band pass filter scheme mainly uses two kinds of coupling modes, one is the three cavity filter type CT, the other is a TM mode(two mode four cavity) filter. And the two ways to take into account the SU-8 multilayer processing technique.According to the requirements of the project research objectives and targets, this paper presents a detailed analysis of the principle of filter and the various filter design schemes, and the schemes are simulated, which focus on the cross coupled filter with transmission zeros, because of the direct coupling method is the traditional design of terahertz filter based on coupling theory are used in this way, the coupling inhibition performance was not very good in band. So the thesis tries to achieve terahertz cross coupling filter using SU-8 technology. But at present due to the limitation of the processing conditions, making 300 GHz simulation model difficult to realize, So the paper finally uses the filter model of the 10 GHz to process the sample. Then finishing the sample processing, verify the feasibility and performance of parameter estimation and testing, results showed that all indexes meet the project requirements. Finally, this paper summarizes the main research contents and conclusion are given, the follow-up work to strengthen and improve the direction. |
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