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Research On Optical Waveguide Ring Resonator Biochemical Liquid Sensor

Posted on:2016-09-23Degree:MasterType:Thesis
Country:ChinaCandidate:M Q ZhangFull Text:PDF
GTID:2308330473455872Subject:Optical Engineering
Abstract/Summary:PDF Full Text Request
Optical biosensor prevents external electromagnetic interference effectively by collecting and transmitting information on the optical domain. It has better stability and reliability, and can work by way of monitoring. It has a high development prospect and widespread attention today. According to its sensing principle, the optical biosensor is divided into fluorescent type and evanescent wave type. The evanescent wave biosensor has higher sensitivity, more functionality and miniaturization by introducing various of optical interference structures which are based on integrated optical waveguide technology. In addition, its fabrication process is also compatible with mature microelectronics technology, thus becoming the focus of the study.Optical waveguide ring resonator has compact structure, flexible design, easy integrated and can achieve a high quality factor. The optical biochemical sensor based on the optical waveguide ring resonator not only has the advantages of that optical sensor has, but also can achieve higher sensitivity. Therefore, it is significant to study the optical waveguide ring resonator biochemical sensor. This dissertation focuses on detecting the concentration of glucose based on polymer optical waveguide ring resonator. The design, fabrication and measure of two-mode-interferometer-based polymer waveguide ring resonator biochemical sensors have been studied. The main work and the achievements are as follows.Firstly, according to the selected polymer materials, the single-mode waveguide used in ring resonator, together with the range of refractive index which can be detected,have been investigated by effective index method and Marcatili method. Furthermore,combined with the coupled-mode theory, the two-mode interferometer used in ring resonator has also been investigated.Secondly, the basic structure and main parameters of the ring resonator are presented based on the two methods. Then, the bending loss of the ring waveguide has been investigated and the optical transmission spectra characteristics of the ring waveguide resonator have been simulated.Thirdly, the fabrication process of the device was investigated, together with the designed parameters of the ring waveguide resonator, the mask used in photolithograph was designed and custom-made. By studying and optimizing the process parameters inphotolithography, magnetron sputtering, and inductively coupled plasma etching, the proposed polymer optical waveguide ring resonator sample which has small surface roughness and better sidewall verticality have been fabricated successfully.Finally, by setting up an high-precision optical test platform, the result of transmission characteristics with the fabricated fixing on cladding optical waveguide ring resonator have a wavelength isolation of 18 d B. Measuring four kinds of glucose solution with different concentration, i.e. different refractive indices, employing different ring resonator with different length of the two-mode waveguide. The experimental data have been analyzed, and the result show that the fabricated ring resonator biochemical sensors have the detection limitation of 3.8×10-4 RIU.
Keywords/Search Tags:polymer waveguide, ring resonator, biochemical sensor, glucose concentration
PDF Full Text Request
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