Filter Design And Implementation Of The Nano Position Control System

Nano positioning technology is one of the key technologies in the field of frontier science engineering technology. With the development of science and technology,nano positioning technology has been widely used in aerospace,semiconductor industry,biological engineering,medicine and other fields. Nano positioning technology is usually implemented in the form of nano position control system.And for the nano position control system,the presence of noise directly affect the control precision of the control system. In order to improve the control precision of nanometer position control system,this thesis mainly studies the design and simulation implementation of digital filtering. The main works are as follows:(1)This thesis introduces the research significance of the filter design in the nano position control system and introduces the present situation of research and application of nano position control system and digital filter at home and abroad,it illustrates that the filter design of the nano position control system is still in its initial stage.(2)Analysis the noise of nano position control system. First of all,introduce the overall architecture of the nano position control system from the two aspects of hardware and software. Secondly,in view of the noise source analysis of the control system,it is concluded that the noise mainly comes from the signal acquisition system and the machine itself.Finally this thesis analysis the characteristics of noise and concludes that the noise of the acquisition system is a high frequency noise and it needs to filter by using low-pass filter,the noise of the machine itself is a specific frequency noise and it needs to filter by adopting band-stop filter filter.(3)Design the digital low-pass filter and digital band-stop filter algorithm and use MATLAB to do the simulation experiments. First compared the amplitude-frequency characteristic and phase frequency characteristics of the traditional FIR filter and IIR filter,based on a large number of MATLAB simulation experiments,this thesis determines that the digital low-pass filter uses FIR hamming window type and the filter order number is 110,the digital band-stop filter algorithm uses the case-based reasoning culture optimization to design, the filter order number is 124.(4)Experiment research based on the designed filter algorithms in the nano position control system.In the PC monitoring software of nano position control system,this thesis uses the mixed programming design method to design the system PC interface of filter function to filter the noise mixed in the step response signal.Finally the experimental results show that after the filtering of low-pass filter and band-stop filter, noise is successfully filtered.The effectiveness of the designed filter algorithms are presented in this thesis.In conclusion,this thesis mainly discusses the filter algorithm of the nano position control system.The simulation implementation results show the feasibility of the algorithm,and the filters can effectively ensure the positioning precision of the system.The filter algorithm of the nano position control system has a certain reference value for relevant filter algorithm of similar system design.