Study On The Linear Arrays Of Microwave Microplasma Source Based On A Microwave Resonator

Microplasma source has many advantages of high plasma density, good stability, low cost and ease to be integrated. Therefore, its application covers almost all aspects of human life. In recent years, research on microplasma source has become a hot topic. However, some disadvantages of linear arrays of microwave microplasma source based on a microwave resonator exist, including large volume and nonuniform distribution of ignited microplasma.Based on microstrip resonator theory and mode coupling theory(MCT), a double linear arrays of microwave microplasma source with the gap of 0.1mm based on a microwave resonator at 2.45GHz is studied using HFSS software. And the influence of related parameters on the double linear arrays of microwave microplasma source is analysed. The simulated results show that some parameters such as feed position, the space between adjacent array resonator units, coupled modes and the size of ground conductor have obvious influence on S parameters, Q value and electromagnetic field distribution at the discharge gap of double linear arrays of microwave microplasma source. At the same time, S parameters, Q value and electromagnetic field distribution at the discharge gap of circle arrays of microwave microplasma source with the gap of 0.1mm is investigated at 2.45GHz using four different structures of single feed space coupling, single feed strip coupling, two-feed space coupling and two-feed strip coupling. The work in the thesis provides some references on the research of larger area or specific shape microwave microplasma source.