| Fast steel mirror (FSM) is widely used in optical communication, astronomicalobservation, space technology, laser radar, laser processing, laser dimensional measurementand other fields，it is a core device which can control beam direction precisely or scanquickly. FSM array can enhance the reaction rate and integrate multifunction. And this morecomplex system needs better control technology. Open-loop control technology could meetthe requirements for system stability and performance. But closed-loop control technology isbetter.The feedback control technology of one-dimensional and two-dimensional piezoelectricceramics driven FSM systems, as well as a two-dimensional FSM array system wasresearched in this project. The hardware part includes installation of the sensor, ElectroMagnetic Compatibility (EMC) design, signal processing circuit design, etc. And thesoftware part includes data sampling and processing, and establishment of the system model.All my work includes the following four aspects:(1) According to the characteristics of the sensor and the application environment,resistance strain gauge was selected as the feedback sensor. A way of installing the straingauges and a plan of Electro Magnetic Compatibility (EMC) design were found out.(2) A signal processing circuit of resistance strain gauges was designed, multipleversions of the circuits used to single mirror system and FSM array system were producedand debugged.(3) Calibration experiments of one-dimensional system and two-dimensional systemwere performed. Therefore the signal acquired by the strain gauge can be used for feedbackcontrol of the mirror.(4) The open-loop transfer function model of FSM system was studied. The RecursiveLeast Square (RLS) algorithm was used for parameter identification, and a transfer functionmodel of the system was built successfully. |
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