One-dimensional Piezoelectric-drive Micropositioning Stage

With the development of science and technology, micropositioning achieve morewidely application to meet the fast growing needs of equipment precision. Because ofshowing a lot of advantages, such as no magnetic fields, large force generation, rapidresponse, low power consumption, no wear and tear, vacuum and clean-roomcompatible, operation at cryogenic temperatures and so on, piezoceramic actuators areideal device in micropositioning system. However the maximum output displacement ofmotors is very small. Flexure hinges can amplify the displacement to hundreds ofmicrometers.As a result, flexure hinges greatly extend the application range and area ofpiezoceramic actuators.Based on several types of piezoceramic stack actuators provided by our team, atwo stage symmetric displacement magnifying mechanism with flexible hinges is usedand they are proved by the FEM Program Ansys10.0. On the basis of analyzing,optimization analysis is done for the not reasonable structure, until to achieve thedesired results.At the same time, Akind of piezoceramic stack actuators is made by tape-casting. Aseries of tests about piezoceramic stack actuators have been done in this study, includingstatic, dynamic and temperature tests.The experimental results are identical to theoryvery nicely.