| The organic electroluminesence display technology which has the characteristics of wideviewing angle、 high resolution and flexible display has the broad prospects fordevelopment.There are two major challenges for the manufacture of large size organic lightemitting diode,one is that how to pattern the organic layer with high resolution,the other is thathow to improve the yield during the producing of large size device.So,a new technology calledorganic vapor stamp jet printing has been come up with. In this technique,organic vapor withhigh temperature is carried by inert gas and deposit on the substrate.The whole organic layer canbe made with one jetting.First of all, According to the whole printing process, the mathematic models of manyprocesses like the inert gas carries the organic vapor, the mixed gas flows through the pipeline,the mixed gas ejects from nozzle and the organic vapor deposits on the substrate has beenestablished based on fluid mechanics, aerodynamics, molecular dynamics and heat transfertheory. these models can be used to predict shape and sizes of the patternings on differentcontrol parameters.Subsequently, the whole organic vapor stamp jet printing system has been built based onthe theoretical analysis. It consists temperature control system, substrate cooling system, gaspressure control system,three dimensional stage, image collection system, clearance detectingsystem and software control system. Pattern nozzle has been made using the SiliconMicrofabrication technology.Next,the working principle and the process of the system have been researched usingsilicon nozzle and AL. The experimental results showed that nozzle diameter, evaporationtemperature, substrate temperature,carrier gas pressure, distance between substrate and nozzle,valve switching time and substrate moving speed have a close relationship with the size.Finally,simple organic patterns with high size and position precision have been made usingsingle nozzle scaning the substrate or array nozzle jetting once. |
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