Design And Fabrication Of Micro-Nanofluidic Biochips Towards To Bio-Molecule Detection

Up to now, the micro-fluidic chips have been considerably developed around every country in the world. Meanwhile, the nanofluidic chips, whose one-dimension of the channels is at least close to nanoscale, have attracted the attention and interest of the public. When the size of the channels deceases from micrometer to nanometer, the physical characteristics of the channels may change obviously. The changes will play an important part in the application of chips. Therefore, how to successfully fabricate biochips has been an essential topic in the recent years.After considering numerous structures of the biochips and the methods for the fabrication, we design and fabricate the micro and nano fluidic chips towards to the bio-molecule detection. The main process can be divided into several parts as below:Firstly, for the design of the chips:by analyzing the transportation theories of the ions in the channels and the biochips which have been obtained, the chip in the experiment is designed to4functional units for the bio-molecule detection. Exactly, the4units are injection unit, the mixing unit, the ion separation unit and the waste unit respectively. The bio-molecule detection can be achieved by the4functional units. In addition, according to the special requirements of the experiment, both the micro and the nano chips are designed for the successfully sealing.When it comes to the fabrication of the chips:after studying the recent methods applied in the fabrication, we adopt the UV litho and wet etching technology as the two main technologies in the experiment. The shapes are transformed from the mask to the chips, and then the channels are etched. By controlling the etching time, the certain depth of the channels can be obtained.Then, the sealing methods:after the fabrication of chips is required. The channels need to be sealed in an inclosed space. Both the PDMS-to-glass and the glass-to-glass methods are applied in the experiment. For the glass-to-glass method, the nano chip and the micro chip are sealed by the heating of muffle surface. Similarly, the PDMS and the glass are sealed by the Plasma cleaning deviceFinally, the results after injecting the fluid:when the sealing finished, we tested the results of the two kinds of sealed chips, and the results are analyzed.In conclusion, the whole process and the design methods are concluded in order to make any improvement in the future.