Experimental Investigation Into Fabrication Of Microstructure By Nanosecond/Femtosecond Laser

Because pulse laser has the characteristics of high energy density effectand low thermal diffusion, which greatly improves the ability of laser micro processing,make it become the research hotspot in the field of laser processing in recent years.In order to understand a system of pulse laser etching, ablation mechanism, thispaper experiment using nanosecond, femtosecond laser has the representation inpulse laser as the light source of the, four aspects of research work。First, we usenanosecond laser interference experiment of double beam single exposure, doublebeam and double exposure and double beam three times exposure in photoresistSU-8surface, pore structure of interference fringe structure and array periodic isobtained, and the interference fringes, the quality and depth of laser power, pulsefrequency, and irradiation time were analyzed. Secondly, interference of the etchingon the nickel plate surface using four beam was obtained with nanosecond laser,micro structure surface periodic arrangement of rectangle hole.Third, the use ofmask processing periodic micro structure, the study found that the structure of thesurface quality is better, with hydrophobic, better cycle and coated with non Teflonmicro surface hydrophobic structure effect. Fourth, study on surface of stainless steelby femtosecond ablation, found that the ablation aperture, ablation depth and laserpower, pulse frequency increases linearly, while the ablation quality holes are alsoaffected by pulse frequency and power.