Study On Pressure Sensor Based On MEMS Technology

Oil pressure is an important parameters of engine, generally uses the oil pressuresensor to detect. Combining with the demand of the enterprise, this paper use with thehigh sensitivity, good dynamic response, high precision, small volume, price cheapadvantages of MEMS chip, developing MEMS pressure sensor for measuring thediesel engine oil lubrication system pressure, replacement of mechanical pressuresensor, drive moving-coil pointer pressure gauge shows pressure value, when the oilpressure is insufficient, light pressure lamp.At first, this paper deeply analyzes the MEMS technology research status atdomestic and abroad, on the basis of the technical parameters and indicators of the oilpressure sensor, determines the overall design scheme of the oil pressure sensor, andthe main circuit of sensor part of the detailed design. Based on the zero drift andtemperature drift characteristics of MEMS chip, in-depth analysis of the causes of driftand the characteristics of common compensation methods put forward thecorresponding solutions, and for the detailed design software calibration andtemperature compensation. The paper has set up a test bench for the sensor prototype,for performance testing, multiple sensors and analyze the test data and statistics. Testresults show that the sensor can meet the required parameters, the simple and feasiblecalibration and compensation algorithm is an effective compensation method forcalibration. This research of sensor can meet the needs of mass production, has theapplication value and market prospect, and also has positive significance to design andmanufacture of product seriation and similar products.