Fabrication And Study Of Out-of-plane Microarray Structure

Preparing micro-array based on micro fabrication technology iscurrently a hot research field, micro-array has a wide range of applicationsin the bio-medical field and a bright future. Micro-array can be classifiedas in-plane micro-array and out-of-plane micro-array based on externalmorphology, in-plane one makes the fabrication more simple as its axialdirection is parallel to the surface of the substrate, but it needs highperformance of mechanics and its loading drug ability is limited, so as theout-of-plane array’s axial direction is perpendicular to the substrate surface,the production processing is relatively difficult.This article focused on designing of out-of-plane array, simulation,processing preparation, the template mode conversion and the final testingon some aspects. Specifically, firstly, evaluating and designing the3Dstructure of some various types of micro-array according to the actualneeds, and then selecting the silicon anisotropic etching as the initialprocess according to the comparison, by which could get good sharpnessand consistency concave cone structure, these concave cone structures canbe used as probe of needles and electrodes and the entity of wells bymolding, And then preparing a number of material for reserving mode.Using the ANSYS software to simulate the force situation to determinewhether or not comply with the requirements on mechanical according to their density, Young’s modulus and Poisson’s ratio. Then using MEMStechnology to fabricate the master template of micro-needle,micro-electrode and micro-well array, we made a lot of multi-stage andmulti-material molds and samples by mode conversion to meet differentactual requirements. Finally, we used various devices, such as3Dmicroscopy, Bonding Tester, and Contact Angle Measuring Instrument, totest the performance of these samples, obtained large amounts of data,analyzed them and summarized.On the basis of these work mentioned above, further goal, morerequirements, as well as the following work of study plan were brought out,we hope it can benefit the increasingly sophisticated micro-arrayfabrication process.