Processing And Test Of SAXS Channel-cut Type Of Single-crystal Monochromator

With the rapid development of3rdand4rdgeneration synchrotron radiationsources, there are some of properties of synchrotron radiation, such as wide spectrum,high brilliance, high flux, and so on. Synchrotron radiation sources is a systemicengineering that contains X-ray optical, thermal, mechanics, vacuum science,mechanical science, electronics and other science. SSRF was built in2009and sevenbeam lines, eight experimental stations have been running currently and makingsignificant achievements in different fields of science. According to the plan of SSRF,it will be designed more than sixty beam lines and nearly one hundred experimentalstations. And each beam line is drawn from the light source to the experimentalstation may go through the process of monochrome, focus, collimation with the helpof different optical elements. Now, these optical elements are all from foreignprocessing, what may both affect the efficiency and the later maintenance. With thedevelopment of SSRF, it will need more and more monochromators.In order to havethe ability to process these monochromators and some other minds, so do the researchof monochromator crystal processing technology. Our works are presented asfollowing.i. Making an analysis of different monochromators’ design theory, and knowing thekinematical diffraction theory and dynamical diffraction theory are both able toexplain the crystal X-ray diffraction. The dynamical diffraction theory is the mostsuitable to explain monochromator diffraction with Laue case and Bragg case. Inorder to obtain high energy resolution and better collimated light, the use ofmulti-level diffraction and beveled crystal method to design Channel-cutmonochromator, based on dynamics diffraction theory. Finally, calculate thecrystal’s energy resolution and rocking curve, which are from SAXS designedcollimator and analyzer Channel-cut crystal, used in Bonse-Hart camera system.ii. Do research on the technology of monochromator crystal cutting, grinding and polishing from the experience of semiconductor and Photovoltaic industry aboutwafer processing. From this paper, I mainly tell about ways of crystal orientationand processing technology about Channel-cut. Firstly, research on preciseorientation for monocrystalline Channel-cut. Secondly, do some experimentsabout technological parameters, which may affect the process. Such as particlesof diamond, diamond wire fatigue, cutting speed ratio, and the frequency of thereciprocating cutting process. And then do research on Chemical mechanicalgrinding technology of monocrystalline silicon. Mainly study the selection ofabrasive, abrasive granularity, the relative velocity in the process of grinding,grinding pressure, and material removal rate, which affect the grinding process.Finally, try my best to do some simple experiments about crystal mechanicalchemistry polishing technology, and use the diamond, silica polishing liquid,polyurethane and frosted leather polishing pad to polish monocrystalline silicon.All in all, I want to cut silicon in the plastic area, and can produce prefectmonochromators for the requirements of beam line.iii. After the completion of the monochromator’ design and processing, we also dosome research on the ways to test the monochromator’s properties. Such as themain influence parameters, the reflective surface roughness, surface shape,crystal rocking curve, and asymmetrical angle. And then make a test of crystalmonochromator reflection surface roughness, surface shape, rocking curve, andasymmetrical angle, which are Channel-cut type collimating crystal and analyzer,used in SAXS Bonse-Hart camera system. Through the test results compared withthe theoretical calculation, sum up the problems existing in the process of designand processing, and put forward the measures to improve the monochromator.