TFT-LCD Display Panel Array Defect Detection Method Research

Array defect research and detection of TFT-LCD is the most important process in TFT-LCD manufacturing. Array defect detection is the most important process. The process is a combination of SEM, FIB, aging, and other experimental methods, and the film characterization analysis, equivalent circuit analysis, optical, electrical and many other technology testing process, is the important means to ensure the product quality of TFT-LCD display panel making process.This paper is based on the fifth-generation TFT-LCD panel manufacturing process, in the mean time,it refer to high-generation TFT-LCD display panel technology, To display panel array defect detection technology in-depth research, including the type of defects, mechanism, detection methods, with the equivalent circuit model, experimental design, comparative analysis etc. we propose a comprehensive and effective detection methods, in particular, encountered in the production of some non-conventional defect detection test proposed innovative approaches, and through product design Change to achieve more effective detection efficiency, more accurate detection of defects, so as to improve product yield and improve the production line benefits.In this paper the patents and test method involved are already applies to improved detection methods have been applied to the fifth-generation TFT-LCD display panel manufacturing process, and already achieved good economic results. From the actual production Angle,it fills the blank of array detection for TFT-LCD defect detection research of LCD panel manufacturing industry in domestic, and provide more complete reference for people who do research in this field.