Embedded Real-time Software Design Of Step-scan System Based On VME Bus

As the core equipment of IC manufacturing, research of the step-scan system anddevelopment of its prototype have been included in National Planed Major S&TProjects. An embedded software with high reliability and excellent real-time is neededto guarantee the motion control index and the cumbersome execution flow of step-scansystem.Firstly, the architecture and scheme of real-time control system are designed inthis paper. The scheme, as the control core, is based on VME bus, in order to meetthe demand of big data transmission caused by multi actutors and sensors. In order toensure the reliable canning lithography process, IC-e6-VMEa board based on real-timeoperation system VxWorks serves as VME Master module; FPGA and DSP are used toimplement VME Slaver module.Secondly, analysis on the startup course of VxWorks is carried out to get to knowfile constituents and configuration method of a BSP. Then VxWorks operation systemmigration and END network device driver design for IC-e6-VMEa hardware resourcesare both completed. The validity of migration and driver is verified.Thirdly, in consideration of the demand of system, this paper puts forward to D32data transmission scheme to realize VME bus protocol. In this paper, VME D32transmission protocol for VME Slaver module is desgned; PCI/x-VME configurationfor IC-e6-VMEa board is realized as well. Breaking down of real-time software tasksinto smaller, design of task schedule algorithm, design of inter-task communication arecarried on to improve timeliness and reliability of the real-time software.Finally, the details of the design for real-time debugging are accomplished. Thedesign include: VME address assignment for motor channels, design of memory layoutfor VME Slaver modules, planning of work processes. In the end, the sheme ofreal-time debuging is triumphantly applied to practical.