The Piezoelectric Nozzle Research Based On MEMS

The nozzle is the main implement devices of the micro-fluids control system, it can eject all kinds of the fluids and make the accurate supply possible, it has a broad application prospects in the domain of biological、pharmaceutical、chemical、photovoltaic manufacturing, it maybe one of the most typical applications in the recent decades. However, the development of the nozzle is monopolized by the foreigners which make a greatly increase of the cost of nozzle, this make the development of the nozzle belong to ourselves more important.This issue is the independent innovation subject of the Tsinghua University, For drop- on-demand, after the comparative analysis four modes of the piezoelectric establish the theoretical model of the piezoelectric, it can be more small and integrated than others. The thesis analyze the principle and structure of the piezoelectric nozzle, calculate the pressure required to carry out a preliminary, finish the mechanical design of the piezoelectric nozzle.The thesis make the MEMS development of the piezoelectric nozzle, design the process of the nozzle and test, in order to design the drive circuit the thesis establish the model of the circuit. Use the VHDL language finish the digital circuit in the FPGA, after the simulation and the test of Oscilloscope show us the circuit correct. At last from the test of the piezoelectric nozzle verify the development and the circuit of the piezoelectric nozzle correct.The issue designs the MEMS process of the piezoelectric nozzle, after the contrast verify the parameters possible; design the right control and drive circuit. The thesis fill the gas of the piezoelectric nozzle MEMS process and circuit, make the foundation of the piezoelectric nozzle for further research.