Preparation And Performance Of Triboelectric Nanogenerator Based On Two Sided Micro-Nano Structure

The nanogenerator is a kind of electrical devices, which can be caused by temperature changes or small deformation energy into electrical energy. The source of the nanogenerator can collect energy is very extensive, such as physical exercise, the noise in the environment, the nature of the wind, water, temperature change and so on. The characteristics of nanogenerator with low cost, small size and light weight. The triboelectric nanogenerator is a electrical devices based on friction phenomena and electrostatic induction phenomenon. This paper proposes a triboelectric nanogenerator based on two sided micro-nano structure. The polydimethylsiloxane(PDMS) film with micro-nano scale structure is prepared by template transfer method as the friction layer friction generator. In the preparation process of friction layer, the micro-nano scale silicon template structure is prepared by two steps. Silicon template with inverted pyramid graphics prepared by first step photolithography and wet etching process, second by using the method of metal catalyzed chemical corrosion in the inverted pyramid structure were prepared on porous structure of micron scale.Finally through the template transfer method, silicon template on the micro-nano scale structure is transferred to the PDMS film, the preparation of micro-nano scale structure with PDMS friction layer. In addition, this paper uses photolithography and wet etching, rigid copper clad laminate(RCCL) with cubic matrix structure was prepared as electrode layer generator. The PDMS is fixed on the thin film of polyethylene terephthalate(PET), packaged into nanogenerator with Kapton tape.The peak output voltage and output current of triboelectric nanogenerator based on two sided micro-nano structure is 600 V and 156 μA, the output power is 93.6 mW, the current density is 173.3 mA/cm~2, the output power density is 104 W/m~2. Under the load of 4 MΩ,the output power is 16.38 mW,the power density of 18.2 W/m~2.The generator can successfully drived 240 LED lamp, and it can drive a commercial LCD screen, the screen display content to keep up to 5s.The triboelectric nanogenerator based on two sided micro-nano structure has a double friction structure, and the PDMS surface and RCCL surface have micro-nano structure. Compared to the single friction nanogenerator structure, the output voltage and the quantity of electric charge was increased by 1.2 times and 0.82 times. In contrast to both sides without friction nanogenerator micro-nano scale structure, the output voltage of the generator is improved by 4 times, the output current is increased by 6.42 times, the output power is increased by 35.11 times, the amount of charge output increased by 6.85 times.In the continuous work 6000 times and work for 10 consecutive weeks, the triboelectric nanogenerator’s output voltage has not changed significantly, the peak is still maintained at about 600 V.Compared with the conventional nanogenerator, the triboelectric nanogenerator based on two sided micro-nano structure has a lot of points.First of all, the friction surface roughness to improve the output performance of generator.The generator has two friction layer, thus can realize the electrical double output。Secondly, the RCCL not only can be used as a friction layer, and can be used as the electrode layer.The RCCL has good mechanical properties, easy to add. In addition, the preparation of metal conductive material in organic matter is very difficult, the RCCL can be directly used as the generator of the cathode, without preparation of metal and ITO conductive electrode on PET. In summary, the triboelectric nanogenerator based on two sided micro-nano structure has advantages of high electrical properties, good mechanical performance, simple process and long life.