Precision Manufacturing Of Patterned Beryllium Bronze Leaf Springs Via Chemical Etching

As one of the main components of the micro-nano coordinate measuring machine(CMM),the contact probe has a significant impact on the measurement accuracy of the CMM.As a crucial component of the contact probe,the processing accuracy of leaf-spring directly affects the measurement accuracy and applicability of the probe.In order to solve the problems of leaf-spring's processing,such as low accuracy,high cost and difficulty in processing complex pattern.The following tasks are mainly completed in this paper:1.The research actualities of the contact probe elastic mechanism were ummarized.And the manufacturing techniques of the leaf springs were lso summarized.2.A manufacturing technique of the beryllium bronze leaf springs based on hemical etching is proposed.And the eight steps of processing and its recautions based on the principle of chemical reaction of copper with odium persulfate solution are described in detail.3.Taguchi experiments were designed and tested to find the optimal process arameters,and the optimal process parameters are obtained by SNR alculation,analysis of average and analysis of variance.The best ratio f mass of the etchant to water is 1:5,the best temperature of the etchant olution is 50?,and the best exposure time is 2 min and 30 s.4.The four V-shape and other complex shapes of leaf springs for probes were successfully fabricated by this technology.Comparing with wire-EDM reveal that the manufacturing technique of leaf springs through this method with higher accurate and efficiency.5.The practical verification of leaf spring by this manufacturing technique using contact and scanning probe with double elastic mechanisms.The experimental device was built and the key parameters of the probe were tested.The experimental results show that the probe has a repeatability of 20 nm in X,Y,Z three directions,measurement range of ±10 ?m×±10 ?m×10 ?m,a resolution of 5 nm,and a stability of 23 nm within 30 min.The result of practical verification proved that leaf springs manufactured by this method has good practicability.