| MEMS technology is a frontier research field, widely involved in multiple disciplines:mechanical, electronic, optical, and many other disciplines, cross coupling effect betweendisciplines. MEMS regarded as a new technology that can be applied in general application.Torsion micro mirror is a kind of micro optic device which is trended to be used in generalapplications along with the development of MEMS. With the continuous development of microprocessing technology, torsion micro mirror is being developed for application in modern opticcommunication，projection display etc.In this paper, torsion micro mirror cell of MEMS was studied deeply. Firstly, introduced themechanical basic knowledge in detail, presented several common elastic structures and analyzedthe mechanics characters of various elastic beams. After comparing several kinds of main drivemode of MEMS, the paper chose the structure model of MEMS micro-mirror array unit of torsionbeam structure. And the parts structure size of micro-mirror array unit was designed basing onintroduction of its basic operating principle. The torsion beam twisting movements of micro-mirrorunit was analyzed emphatically. By comparing the turning angles changing relationship ofelectrostatic torque and restore moment, we got the root cause of causing electrostatic Pull-inphenomenon. At the same time, in view of the simplified torque arm microcontroller drive model,discussed the analysis methods for static Pull-in phenomena, and to get used to describe the Pull-in phenomenon of parametric analysis formula.In the subsequent chapters, in order to testify the rationality of the structure of micro mirrorarray units, the studies of static and dynamic characteristic parameters based on Structure-electrostatic coupling field have been developed by ANSYS, such as modal, harmonic responsefrequency and voltage. At the end, the micro mirror array unit process layout design was presentedwhich combined with micro drive working performance requirements and production technology.The suitable double metal wiring was selected by a key study on double metal wiring technology.Through analyzing the properties of polyimide, researching sacrificial layer technology (curing,hole groove production and release), then the movable mirror structure was made by sacrificiallayers, they ware released by means of oxygen plasma dry etching process.Finally，summarized the above research work and put forward what can be done for furtherresearch. |
PDF Full Text Request