Study On The Fabrication Of Micro-needles Arrays For Transdermal Drug Delivery

The micro-electro-mechanical system (MEMS) can do accurate operation and realize monitoring in real time in the small space that traditional instrument can't enter into, therefore there is extensive application in biomedicine, such as the accurate injection of medicine , clinical monitoring , micro-operation , micro-planting system etc. The appearance of MEMS technology has brought the new means to biomedicine. The array of the micro-needle is an important application in medical science of MEMS technology. It can be extensively used in such fields as biomedical measurement, the delivery of medicine and the sampling of micro-fluid. It is the small size, high intensity, and its materials have such characteristics as biologically compatibility etc. It can control the depth of entering into the skin accurately, thus reduce the damage to the skin and realize the painless purpose. It offers the high-efficient secure medical means to patients and accord with the humanized characteristic of medical research even more. It has brought great vigor into biomedical field and it is very meaningful to do some research.This master's subject regards the micro-needle array which is used in trans-dermal drug delivery as the research target. The main fabricating technology of the micro-needle array is studied which includes the fabricating of the micro-needle point, the fabricating of the micro-needle hole and the cooperation of fabricating the micro-needle hole and the micro-needle point. The fabricating of the micro-needle point adopts isotropic etching technology and the fabricating of the micro-needle hole adopts the deep etching technology. It gives the detailed theory explanation and the study with the experiment to the two kinds of fabricate technologies in the article.This text is made up of five chapter contents altogether.Chapter one is the survey. It introduces the research background and research meaning of the subject from the Development of MEMS technology and the research development of the micro-needle in the bio-medical field.Chapter two is the structural design of the array of the micro-needle. The two kinds of micro-needle arrays in different structure has been designed based on the structure characteristic of skin and the mechanism of trans-dermal drug delivery by consulting the study on the array of the micro-needle in foreign documents. Considering form the use and the micro-fabricating technology, The main fabrication process of array of the micro-needle is designed and it is proposed that the problem needing to be solved especially in the fabrication experiment.Chapter three and chapter four are about the research of the fabrication technology of the micro-needle array, which is a main part of the research contents. The two kinds of key fabrication technology of the micro-needle array have been studied, which are HF-HNO3 etching technology and the ICP etching technology. With the goal of high etching speed and high surface quality, the optimal fabrication route is summarized by studying the mechanism of silicon etching and doing a large number of etching experiments. These basic technology researches have offered the choice and practical experience curve for the fabrication of the micro-device that is made of silicon.Chapter five, summarize and expectation. The achievement made in the structural design of the micro-needle arrays and in the study of the fabrication technology is summarized from the full text. It have been analyzed that the problems existing in fabricating technology and deficiencies in research work. It has been proposed the further research approach of the array of the micro-needle.