Development Of Vacuum System Of Hot Embossing Machine For Fabrication Of Polymer Micro-nano Structures

Hot embossing technology has the advantages of low cost, high resolution, and it is one of micro-nano manufacturing technology. It is widely used in the fabrication of micro-nano devices, such as micro-nano optical components and micro-nano fluidic chips. There will be bubbles between the mould and the chip when the structures were fabricated by hot embossing in a non-vacuum environment. The main contents in this thesis are as follows:A vacuum device which can adjust the position of pressure head plate adaptively was designed for the RYJ-I hot embossing machine. The design scheme of hot embossing vacuum device was determined. The mechanical structures were designed. Thermoelectric coolers were used as heating and cooling components of the temperature control system. The power of heating and cooling was calculated. Pt100platinum resistance temperature sensor was used to measure the temperature of pressure heat plate. The power circuit of thermoelectric coolers was designed. The temperature field of pressure heat plate was simulated. The sealing system has several kinds of seal, the friction between transmission shaft and vacuum enclosure was calculated. The assembly and installation process was developed.The temperature control experiments, vacuum experiments and contrast experiment were carried out. The heating and cooling speed and temperature control precision of pressure heat plates were measured. The atmospheric pressure in the vacuum chamber can be reduced to600Pa. The contrast experiment validates that there will not be bubbles when the structures were fabricated by hot embossing in a vacuum environment.The experiments of polymer micro-nano structures fabricated by hot embossing were carried out. The hot embossing mould is made of Si, the micro-nano holes and grating grooves on it were fabricated by focused ion beam etching. PMMA was used as the hot embossing material. The hot embossing experiments were carried out. The micro-nano structures fabricated by hot embossing have complete external shape. Influence factors on replication quality of hot embossing, such as hot pressing temperature, hot pressing pressure, demoulding temperature, time, were analyzed.