Three-dimensional Modeling And Optimizing Of The PECVD Device In Solar Cell Production Line

The paper takes the PECVD device of solar cell production line as the object of study. The3D simulation model and the finite element analysis have been conducted to select the optimalmanufacturing material. One new style setup has been designed to accommodate therequirement of Domestic Corporation. The whole work and conclusions as following:Based on the measurement data of the real PECVD device, all the parts model of theequipment are established. Then, the whole model is assembled basis on the assembly sequence.The key components of the equipment (pole plate, lateral plate and bridge) are analyzedusing the ANSYS software. The analysis results are compared to decide the optimalmanufacturing material.For solving the problem that scratch coating glass, one new-type feed mechanism has beendesigned. The defective index is deduced sharply by transferring the glass first and clampingimmediately. The effective of the mechanism is verified by the dynamic simulation.