Design And Analysis Of Flexure Hinge For PZT-based White-light Interferometer

Because of its small volume, no mechanical friction, no gap, high sportssensitivity, high precision guidance and many other features, flexure hinge iswidely used in many fields, such as precision machinery, precisionmeasurement, precision balance, nanotechnology with unprecedentedprecision and stability. Vertical scanning white-light interferometer(WLI) isdeveloped based on the principle of light interference. With high sensitivity,high speed, superior stability and non-contact measurement, it can be used innanoscale measurements, surface roughness measurement, ultra-precisionsurface profile measurement, evaluation of optical systems, and many otheroptical inspection fields. The performance of flexure Hinge formicro-displacement positioning mechanism plays an important part in WLI’smeasurement accuracy.Based on the vertical scanning white-light three-dimensional topographyinterferometer for measuring the topography of diamond grinding wheel’ssurface, a flexure hinge mechanism has been designed for themicro-displacement stage, and studies have been carried out on the modelingof static mechanical properties, dynamics analysis and experimental research.The main contents include the following aspects.First, from the general formula of rotational stiffness of3common typesof flexible hinges have been derived from the mechanics and calculusequations, and the rotational stiffness of3common type flexible hinges havebeen given. The changes of rotational stiffness are analyzed with statics whileadjusting hinge parameters.Second, the features of dynamics have been studied in depth. A flexurehinge dynamic model was set up and the mechanism parameters on dynamicperformance was researched; the natural frequency and sensitivity of theflexure hinge were analyzed; After analysis of flexure hinge stress and strain, maximum flexibility and dynamic stress occurs position are given.Third, through the flexure hinge deformation simulation and analysis, therelationship research between flexure hinge stiffness and dynamics of theintrinsic was carried out.Finally, according to the structure and performance parameters, flexurehinge mechanism was designed. A flexure hinge mechanism model is set upwith Pro/Engineer software. The methods and procedures of finite elementanalysis are given, and simulation analysis, simulation results and theoreticalresults are analyzed and verified by comparing the effectiveness of theflexible hinge mechanism and correctness.