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The Research Of The White Light Interferometer Precision Platform

Posted on:2015-01-18Degree:MasterType:Thesis
Country:ChinaCandidate:T LiuFull Text:PDF
GTID:2272330479498648Subject:Mechanical engineering
Abstract/Summary:
In the field of modern precision machinery and scientific research precision motion platform are playing a crucial role, its machining accuracy seriously affect the positioning accuracy. Flexible hinge depends on the elastic deformation of the flexible structure itself. The characters in flexible hinge are light weight, the short time of processing and assemble and small problems about clearance and friction lubrication.The paper is based on Changchun Institute using America NYGO produced white light interferometer new-view platform. With the fact of precision misco-displacement levels of the mobile station, flexible hinge structure are used for precise adjustment of the structure of the station design and research, coarse platform and precision platform combination meet the requirement of both long stroke length and high accuracy. The software catia are used to design three-dimensional rendering of the overall structure of bench. ANASY Workbench 13 are used to analysis statics and dynamics modal analysis of the misco-displacement mechanism.
Keywords/Search Tags:flexible hinge, structure design, Ansys
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