Technologies Of Precision Driving And Positioning In Four Degree Of Freedom Adjustment Worktable

With the rapid development of advanced equipment manufacturing industry, requirements on the precision of machining and assembly process of the cylindrical parts will be very hard, which will result in a higher demand on the measuring accuracy of the surface shape of these components. As the dedicated measuring instrument for cylindrical parts, cylindricity measuring instruments’ measuring accuracy relies much on the precision driving and positioning technologies.In this paper, researches on theoretical analysis, modeling and experimental verification about the technologies of precision driving and positioning, which will provide many theoretical foundation and technical reserves for improving the measurement accuracy of cylindricity measuring instrument.The main contents are as follows:Firstly, the structure and principle of the four degree adjustment worktable has been analyzed. A model for the eccentric adjustment of the worktable has been established. The calibration method of the angle between the adjusting coordinate system and the measuring coordinate system has been designed. A model for the tilt adjustment of the worktable has been established.Secondly,the motion control strategy based on digital logic transform has been designed. The device of precision driving table based on digital logic transformation has been designed and the return to zero error is less than 1.3 μm.In addition, the principle of three axis control system has been studied. Three axis control system has been designed.Finally, the reasons of low adjustment precision and low adjustment efficiency of traditional structure worktable have been analyzed. And on the basis of this, the motion control method and device of four degree adjustment worktable based on grating ruler and encoder feedback has been designed. Through the experiment, it has been proved that the double feedback structure is superior to the traditional structure in the adjustment precision and the adjustment efficiency. The eccentric accuracy of double feedback table can reach 0.2 μm, the regulation precision of tilting can reach 0.8 "...