Method And Theoretical Study Of Metal Micro Machining Based On Femtosecond Laser

Femtosecond laser technology has become one of the main technologies of high and new technology, material processing is also forward to the development of micro-nano size, high integration technology requires processing accuracy in the micron or even nanometer level, and the unique advantage of femtosecond laser in this aspect is much more popular, so it has been widely concerned. The related scholars have devoted themselves to studying the interaction between femtosecond laser and materials, the ablation mechanism in the process of action is studied, and a wide range of experiments are also carried out. In this paper, the following work has been carried out on the basis of discussing the theory of femtosecond laser machining of metals:(1) The two temperature model is a typical model of femtosecond laser processing of metal, the double temperature equation by finite difference method, under the premise of considering the heat conduction between electrons. In the first, the numerical simulation of the single pulse ablation of Ni Ti alloy was carried out, the influences of laser energy density, pulse width and delay time on the temperature of electrons and lattices are obtained.(2)Improve the single pulse laser light source of the double temperature equation, and the light source of the three pulses is obtained. Using the improved double temperature equation, simulation analysis was made on three pulse conditions. The three-dimensional evolution of electron and lattice temperature with time and depth in the three pulse condition is simulated and analyzed, the pulse number, pulse width and laser energy density of electron and lattice temperature influence. Through the simulation analysis, it is found that the micro-nano machining of metal materials can be realized by using femtosecond laser.(3)Femtosecond laser processing system is introduced, summarize the effect of different processing parameters on drilling and marking. Finally on the basis of theoretical analysis, a preliminary experimental study on different metal materials was made by using the femtosecond laser machining system, the processing of high quality.Through theoretical and experimental research on femtosecond laser micromachining of metals, a more clear understanding of the internal mechanism of the ablation process, to lay the foundation for the further study of other complex phenomena in the process of action. Through the experimental study, the double temperature equation proved the accuracy of simulation results also show that the femtosecond laser micromachining of metals can be achieved. Provide accurate guidance for the application of femtosecond laser in the practical application.