Research Of Femto-second Laser Micro/nano Fabrication Technology Based On Phase Modulation

Femtosecond Laser has the features of high fabrication resolution and 3-D fabrication ability. But femtosecond laser fabrication has a problem of big aspect ratio which affects a lot on 3-D resolution of fabrication. Superresolution is a technology that can enhance the fabrication resolution of optical system by compressing the focal spot smaller than Airy disk. Under the support of advanced fabrication technology field, extreme fabrication subject of 863 projects (non-silicon 3-D Micro/Nano fabrication technology based on ultrafast laser), we used the theory of superresolution, combine the theoretical calculation and experimental analysis, improved the fabrication properties of femtosecond laser. The main contents of this research include:1. Using the superresolution theory of femtosecond laser to analyzed the phase modulated superresolution, optimized the parameters of phase modulation in Genetic Algorithm, produced two kinds of phase filter that had the abilities to improve the aspect ratio and line width of the solidified unit;2. Analyzed the superresolution ability of phase filters in femtosecond laser fabrication system with a series of experiment, got the solidified units optimized by two kinds of phase filters, get the results that the phase filters can decrease the aspect ratio and line width of solidified units 10% ~ 20%;3. Monte Carlo model was built using the experimental results, analyzed the effects on solidified units with the changes of special distribution of focal spot and parameters of photon sensitive resin before and after phase modulation;4. Micro/Nano meter scale structure was fabricated in two kinds of photon sensitive resin, the effects of different resin's feature on fabrication was analyzed.