Low Temperature Growth Of Graphene On Silicon Substrate And The Study On Optical Characteristics

Carbon is the most attractive elements in nature. Especially in the past 30 years, the research of carbon materials has been the frontier of technological innovation. The discovery and research of graphene has been in the limelight in recent years. Graphene is a two-dimensional crystal, which is composed of a single layer of carbon atoms, and the electrical and optical properties quantum effect is very special. The thickness of single layer graphene is only about 0.4nm. Graphene is seen as the perfect alternative to silicon materials.People are interest in the ultra micro transistor applications which can be used to design the future super computer whose processor speed will be faster than the computer now hundreds of times.This paper mainly studies the growth process for graphene and optoelectronic properties. The specific contents and conclusions are summarized as follows:(1) Graphene grown at low temperature.Growing graphene in copper foil preliminary. Optimize parameter, such as CH4 and H2 flow rate, growth time, growth temperature, preliminary inquiry of graphene growth process. Plating Cu,Ni,Cu-Ni alloy,on Si / Si O2 substrates,respectively at different temperatures to grow grapheme. Compare the graphene crystalline quality, layered effect, flat degree under different temperature by Raman to obtain the optimum effect of laboratory preparation. At the same time, according to the Holzer effect of graphene under the action of magnetic field to test the carrier mobility, it was found that the theoretical value is slightly lower than the theoretical value, which is due to the small amount of defects in the product.(2) The software simulation of the optical properties of grapheme. Simulating the optical properties of graphene materials under light condition by wave optical module in Comsol Multiphysics. The graphene material alone is almost transparent, that is to say the absorption of light is very small, probably around 2.3%.So we designed the structure in resonator, the graphene as a dielectric layer on special shaped gold film. We mainly obtain the absorption effect of the special structure of light in the standard conditions, On this basis,understand the graphene devices, try to design Optical detector, terahertz detectors and other devices.