Preparation And Characterization Of Zr Based Amorphous Thin Film By E-beam And Resistance Composite Evaporation

Amorphous alloy was first founded as thin film fabricated by vapor deposition. Vacuum vapor deposition have some advantages such as no need to prepare the target, process simple, high film purity. However, few research work about amorphous alloy thin films prepared by vacuum vapor deposition have been reported. Because of Zr-based amorphous alloys have excellent properties and good thermal stability. In addition, Zr-Cu alloy is a typical amorphous binary alloy system and for now, preparation and properties of Zr-Cu-Ga amorphous thin films have not been reported. In view of this, Zr-Cu and Zr-Cu-Ga component amorphous thin films were prepared by electron beam and resistance composite evaporation under substrate without cooling device. Zr deposited by electron beam evaporation source, Cu and Ga deposited by resistance evaporation source.For Zr-Cu alloy thin films, the glass forming composition range, thermal stability and morphology are researched. The influences of sample deposition time on microstructure, thermal stability, film thickness, morphology, surface roughness, optical and electrical properties are systematical studied. Results show that this composite coating technology is able to conveniently prepare a wide range of glass forming composition of ZrxCu100-x amorphous thin films (x=30-85at%). However, thin films show lower crystallization temperature and no obvious glass transition temperature. In addition, structure and properties of thin films are sensitive to sample deposition time. With the extension of deposition time, sample gradually transformed from amorphous structure to amorphous and nanocrystalline composite structure; surface topography gradually transformed from smooth morphology to larger size of clustersr-like microstructure. Surface roughness and resistivity of thin films gradually decreasing with the increase of deposition time, but reflectivity of samples exhibits an increasing trend.For Zr-Cu-Ga alloy thin films, the influences of Ga content on microstructure, thermal stability, morphology, electrical properties are systematical studied. Results show that the glass forming composition of Zr-Cu-Ga amorphous film is wider than bulk and ribbon of the same component. Amorphous thin film obtained in this method shows poor thermal stability and isolated gainy-like surface microstructure.