Development Of Micro-Spectrometer For Variable Line-Space Grating Position Sensor

In recent years, a large number of Micro-Spectrometers are used to demodulate the optical sensor for aviationas FLASH was proposed. Though varied line-space grating position sensor has high stability under ambient temperature from-55℃to+70℃, The Micro-Spectrometeris hard to accomplish the goal that the maximum error of wavelength is smaller than required0.3run (1‰of wavelength of300nm).Then we successfully made a Micro-Spectrometer based on improved cross Czerny-Turner optical structure which still have stable output under temperature shock environment.Experiments show that the new spectrometer meets the design requirement. In the end,the system of varied line-space grating position sensor is set up in laboratory to test thedemodulationcapability of Micro-Spectrometer.