| Millimeter-sub millimeter wave has the advantage of narrow beam, broadband width band, high bit-speed, which makes devices to be smaller size. Tera-Hz has been focused as a promising field of state security by many countries.Graphene, known as its special electro-magnetic, thermal and mechanical properties, is becoming hot point in material science, information science. Application graphene cover fabrication and integration of various devices from RF band to optical band.This paper studies the simulation and fabrication of sub millimeter on-chip antenna and Tera-Hz graphene antenna. The main academic contribution of this dissertation is summarized as follows:1. New substrate and feed structure are presented and discussed. Several60GHz on-chip antenna are designed and simulated, including antenna with SRR, dipole and asymmetric bell-shaped on-chip antenna. Comparison of several on-chip antenna is given. A novel asymmetric bell-shaped antenna (60GHz) with uncomplicated process is presented.2. Graphene transmission line and graphene-metal contact is studied. Tera-Hz antennas based on graphene are simulated. Different ways to applying graphene on Tera-Hz devices are discussed. Dipole and U-shape antenna with SRR are designed.3. Complete progress to fabricate60GHz antenna, graphene transmission line and Tera-Hz graphene antenna is presented, which includes lithography of marks, PECVD for S1iO2deposition, graphene transform and other steps. Photographs of SEM are given. |
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