Cutting Force Measurement Tool Embedded Key Technology With Thin Film Sensors

With the development of Precise and ultra-precision machining technology, the cuttingforce measurement sensors and systems is more miniaturizated, higher-precision,higher-resolution, higher-response, real-time and so on. The research of f thin-film resistorssensor which is high-precision, able to adapt to the harsh environment requirements has broadapplication prospects and good social benefits. Based on MEMS technology, measuring thecutting force through the micro-sensor embedded in the tool can directly response the cuttingbehavior and this method is accurate, efficient, and high reliability.This paper made the following studies about some key technology of the measuringcutting force thin-film sensor which is embedded in the tool cutting:1. Analysis the status quo and development of the cutting force measuring instrumentand the measurement technique of cutting, especially the applications and advantages ofthin-film strain sensors which is measuring cutting force. Introduce some method of thin filmpreparation and process.2. Based on analyzing the thin film sensor principle of measuring the force, this paperdesigns a thin film sensor embedded in the tool, the design specifically in the followingaspects: the substrate size, the position of thin film sensors in the tool surface, the materialselect, shape design and resistance of sensitive film gate and the shape design and materialselect of insulating layer and the protective layer. Selected Ni-Cr alloy is selected to be thematerial of thin film gate.3. The tool-sensor system is simplified as a cantilever structure, the theoretical analysisand formula derivation is carried for a relationship between tool force, strain resistance of thegate, the output voltage of the sensor, getting the the relationship between output voltage ofthe sensor and the size of the external force.4. The key technology in the process of preparing the thin-film sensor system isstudied,which including the preparation of the sensor substrate film, the preparation processof multilayer film and lithography process of resistance grid, and conducting some processing experiment, establishing a foundation for the follow-up work.Finally works of this paper are summarized, and the intening relevant work areprospected and discussed. These researches have potential worthiness and an important rolefor the development of thin-film sensors embedded in the tool for measuring cutting forcesystem.