Experimental Reaserch On Fabrication And Characterization Of The Strain Micro Thin-film Sensor

With the continuous development of precise and ultra-precision machining technology, cutting force measuring sensors and systems were required miniaturization with the high-precision, high-resolution, high response and real-time performance. Development of high precision thin film resistor can adapt to the harsh environment of the load cell and measure the pressure required, which has broad application prospects and good social benefits. Based on MEMS technology, micro-film sensors embedded in the tool used to measure the cutting force can be a direct response to the work tool, accurate, efficient and high reliability.In order to develop a cutting force measurement alloy thin film sensor with excellent performance for high temperature and other harsh environment, the new thin-film sensor was designed and produced via combining the new alloy thin film material’s basic properties with the ion beam and magnetron sputtering technology. Based on the force measurement principle analysis of the thin film sensor, a thin film force measurement sensor embedded in the tools was designed, of which the principle mearurement characteristics were studied through simulation software. And the sensor was modified according to the measurement results, and achieved wireless monitor and control through combining mature networking technology.A new NiCr alloy film sensor was designed and fabricated via piezoresistive strain effect, of which the measurement principle was analyzed. Varieties of thin-film sensor production programs were designed, and silicon, slides, titanium, Ni80Cr20, silicon nitride and etc. were selected to fabricate the sensors. The metal substrate processing methods were studied and the titanium alloy was selected as the best base material according to the studying results. Single factor and orthogonal experiments were carried out in terms of the base pressure, ignition gas flow, ignition gas sputtering pressure, sputtering power equipment and other factors. The optimal sputtering parameters group was selected after measuring the averages of the factors such as deposition rate. This optimal sputtering parameters group was utilized to fabricate the film sensor applied on the cutting force measurement, and the film sensor was analyzed on all the properties. Based on this, production process was modified, and the capture tests of statics and unidirectional cutting force were carried.Basic working principle of the strain sensor was discussed and a new alloying film sensor unit was designed by studying the basic properties of the materials. It was explored on the production process of the qualified metal base alloying thin film sensor by combining the distinct processing and fabricating methods. And the sensor characterisics were improved continuously via experiments.