The Study Of Surface Acoustic Wave Pressure Sensor

This thesis meanly about the design, manufacture and test of the Surface Acoustic Wave Pressure Sensor.Firstly introduce properties of LiNbO3material. And based on the properties, chosen the X-1280Y LiNbO3material as the material of the substrate.Then designed the input and output Interdigital Transducer (IDT). Use cosine square function to weight the input IDT to suppress the side-lobes. The output IDT is uniform.At the same time, through calculation, know that when pressure was applied on the Surface Acoustic Wave Pressure Sensor, the output signal and input signal are linear. So established a linear regression model to represent the property. The linear regression model can be solved by the method of least squares.After the pre-treatment, Interdigital transducer graphics, packing and testing, the Surface Acoustic Waver Pressure Sensor was prepared for the experiments.Analyzing the experimental data, found that the Linearity of the applied pressure and the shift of frequency. And the Linearity is about0.36%. The The maximum measurement error is about4.8%.So the Surface Acoustic Ware Pressure Sensor in this paper can be used in the condition of low pressure.