Study On Methods Of Measuring193Nm Single Laser Pulse Energy On The Basis Of Detection Of Wavefront Phase

The laser has a very important role in the field of agriculture, industry, national defense. With the rapid development of laser technology, the requirements of the accuracy of laser energy measurement are more stringent. Our State is currently preparing to develop a193nm projection exposure lithography,the linewidth is asked to be below90nm. Such a high accuracy of its detection equipment is put a forward higher requirement. Especially in the detection of the energy of the light source is particularly important.Based on the way of the present domestic and foreign laser energy measurement s,waveform measurements and phase, We have pointed out their advantages and disad vantages. We propose a precise measurement which is based on of the wavefront det ection to the193nm laser. We verify the feasibility of the method through theoretical analysis and research, The same time, we noted that the impact of the final energy measurement error factors by using of the method for measuring.The main work of the paper includes the following:We have pointed out by a conventional energy measuring method is not able to achieve accurate measurement of the energy, and therefore we need to explore a high precision measuremen method of the laser pulse energy, which is proposed in this paper.At the same time, at the aspect of data acquisition card,because of the final energy is obtained by integration,so we need a high demand on the sampling rate and resolution of the data acquisition card. Therefore, we need strictly choose it. have discussed with the related company technical pointed out their advantages and the premise of the above work.I have used the software for the data processing also I have come to a very important conclusion of the laser pulse energy which conclusions are very valuable for designers of193nm laser light source. For example, when the difference is small, The light intensity fluctuations and phase fluctuations are the same, The value of the light intensity need statistical calculations when the wave difference is calculatated.