Study Of The Properties Of The Photosensitive Layer Of Hydrogenated Amorphous/Nanocrystalline Silicon Liquid Crystal Spatial Light Modulator

The liquid crystal spatial light modulator (LCSLM) is a kind of optical devicebased on electrically controlled birefringence effect of the liquid crystal. The phase,amplitude and polarization state information will change with the changing of theoptical driving signal or the electrical drive signal. It was widely used for opticalcomputing, optical information processing, optical neural network system as the corecomponents. The sensitivity of LCSLM photosensitive layerhas a great impact on theentire performance of LCSLM. So the study for liquid photosensitive layeris veryimportant.Through the analysis of principle of LCSLM, in this thesis, the photosensitivelayerof LCSLM for weak light incident signal has been deposited on ITO glasssubstrates by RF magnetron sputtering. It greatly extends the range of applications ofthe liquid crystal spatial light modulator. The results are showing as following:Through detailed analysis and comparison, a-Si:H and na-Si:H was chosen to bethe LCSLM photoconductive layer.The deposition rate, absorption coefficient, AC resistivity, boron doping amountwere increased and then decreased as the substrate temperature increased; The filmdeposition rate, the deposition rate of the boron-doped, the amount of boron-doped wereincreased and then decreased as the sputtering power increased. The optimal value wasat300℃and300W.The film photoconductive characteristics will be better when the boron-dopedamount was at0.018%.The preparation and contrast for normal a-Si:H LCSLM and na-Si:H LCSLMshows that the na-Si:H LCSLM has a better modulation for weak light incident signal.