| LC filter is a filter with long history and wide range of application, which has asimple structure, and with a complete-design-theory, and also could be the base-designfor other filters. In order to achieve the LC filter’s Integrated, planar spiral inductors andMIM-structure capacitance can be utilized in preparing the integrated LC filter.The main results are as follows:1.The Multi-current-path structure of the plan spiral inductor was configured bydividing the single-wide-track into multi-trickle-tracks, which could reduce the loss ofthe inductor on high frequency and improve the inductor’s quality factor. The inductorwas designed and optimized by using HFSS software. The results show that by adoptingthe multi-current-path structure, the quality factor of the inductor is80%more than thatof inductor without the multi-current-path structure with the same as magnitude. Itprovides some valuable insights for the high-Q value spiral inductor design.2. Summarized the methods of the LC filter design and debugging, designed aseries of integrated LC band-pass filter. Analyzed the distribution parameters affect forthe integrated LC filter, combined the theoretical design with ADS and HFSSsimulation software. Develop a s design methods for the intergrated LC filter, so thatthe theoretical design results and the software simulation results can be consistent.3. Studied the integrated LC filter production process, and developed a solution forthe problem in filter graphical, finally produced spiral inductor samples withmulti-current-path structure samples and integrated LC filter samples.4. Finally, introduced the test method for the the planar spiral inductors andintegrated LC filter, the results show that the electrode thickened with photoresistplating has a better performance than electrode with direct thickened. |
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